SEMICONDUCTOR

Vacuum Barrier Corporation is the world’s leader of LN2 Vacuum Jacketed Piping Systems supplied to the Semiconductor Industry.

They developed the Closed Loop Delivery System for cryoshroud cooling in Molecular Beam Epitaxy (MBE).

The Triax/Phase Separator System supplies instant low pressure, gas free LN2 to cryopanels and cold traps.

For applications requiring higher flow rates we offer SEMIFLEX LN2 piping. Fast cool-down, consistent liquid quality, stable temperatures, small guard bands, all with trouble-free operation.

The system operates basically as follows; two-phase flow of LN2 enters the phase separator. The gas is vented to atmosphere outside the lab leaving a volume of pure, gas-free LN2 at -196° C. The liquid is gravity fed to the cryoshroud through a triaxial feed line.

The LN2 is slightly sub-cooled at the lower end of the piping due to the hydrostatic head of liquid. As the liquid enters the cryoshroud and picks up heat, the density changes, and the lighter LN2 is returned to above the liquid level in the phase separator. Gas is vented off, and the liquid is re-used.

Vacuum Barrier's NITROMATIC liquid nitrogen fill station is designed to automatically fill a Dewar/tank with liquid nitrogen from a piping system or bulk tank.

PDF Files

mbe.pdf
Liquid Nitrogen Circulation and Multi-Wafer Molecular Beam Epitaxy